Ion Beam Etching Tshuab

Ion Beam Etching Tshuab

Ion beam etching (IBE) yog cov txheej txheem ua yeeb yaj kiab nyias uas siv cov khoom siv ion los ua cov txheej txheem tshem tawm ntawm lub substrate. IBE yog hom ion beam sputtering thiab, txawm tias nws yog siv rau kev ntxuav ua ntej lossis cov qauv etching, nws yuav pab kom muaj kev sib raug zoo thiab kev tsim cov qauv ntawm 3D.

Lub tshuab no yog ib qho kev sib koom ua ke, siab-precision, thiab txhim khu kev qha nanoscale lub cev etching cov cuab yeej siv.

Txhawb nanowire dav qhov tseeb thiab ntau hom-siab nam piv qauv etching, tsis txwv los ntawm cov khoom siv, siab collimation etching, siab etching tus nqi, thiab zoo repeatability.

Planar gratings, loj cheeb tsam tshwj xeeb gratings, DOE diffraction Cheebtsam, MEMS li, nyias zaj duab xis circuits, photonic integrated pab kiag li lawm

• Lub ntsiab tivthaiv ion qhov chaw yog nws tus kheej tswj tau.
• Tau tshaj IBE thiab RIBE, nrog rau kev xaiv ua haujlwm hom.
• Haum rau high-precision etching ntawm ntau yam ntaub ntawv, nrog ib txoj kab dav dav txog li 20nm.
• Cov txheej txheem zoo muaj peev xwm thiab kev ntseeg tau ntau lawm.
• Hauv qab thiab sab phab ntsa ntawm SiO / Si grating yog ncaj.
• Tso cai rau beam zog thiab ion flux tswj nws tus kheej.
• Cov txheej txheem yuav siv sij hawm qhov chaw nyob rau hauv ib tug tsawg-siab ua hauj lwm ib puag ncig.
• Ua tau tswj anisotropic etching.
• Muab txhais tau tias rau tag nrho cov ntaub ntawv paub yuav tsum tau etched.
• Tso cai rau lub kaum ntse ntse tswj ua tsaug rau qhov sib txawv etch beam lub kaum sab xis txheeb ze rau tus qauv / daim npog ntsej muag.
• Tso cai rau kev tswj hwm qhov profile / sidewall thiab ua kom pom qhov zoo.
• Reactive gas muaj peev xwm ua rau kom siab dua etching tus nqi thiab ntau dua selectivity etching ntawm ntau yam ntaub ntawv los ntawm reactive hom.

Cim npe nrov: Tuam Tshoj ion beam etching tshuab manufacturers, hoobkas