Ion beam etching thev naus laus zis yog ib qho kev ua haujlwm zoo tshaj plaws uas tau tshwm sim los ntawm 70s ntawm lub xyoo pua 20th nrog kev txhim kho cov khoom siv nyob rau hauv cov kev taw qhia ntawm sub-micron kab dav, uas siv cov sputtering nyhuv ntawm ion beam bombardment ntawm cov khoom nto rau sawb. lub geometry xav tau ntawm lub tshuab ua tiav.
Piv nrog rau machining, tshuaj corrosion, plasma corrosion, plasma sputtering thiab lwm yam txheej txheem, ion beam etching muaj cov yam ntxwv hauv qab no:
(1) Nws tsis yog xaiv rau cov ntaub ntawv ua tiav, thiab txhua yam khoom siv nrog rau cov khoom siv hluav taws xob, cov khoom siv hluav taws xob, thiab cov khoom siv hluav taws xob tuaj yeem raug etched.
(2) Nws muaj peev xwm ua tau zoo heev. Nws muaj peev xwm etching zoo heev zawj qauv, uas yog nyob rau hauv lub micron thiab sub-micron ntau yam, thiab txawm engraving kab raws li me me li 0.008 μm.
(3) Etching muaj kev taw qhia zoo thiab kev daws teeb meem siab. Nws cov qauv yog directionally bombarded los ntawm ib tug collimated ion beam nyob rau hauv lub tshuab nqus tsev vacuum, uas yog ib tug directional etching uas yuav kov yeej lub inevitable drilling thiab etching phenomenon nyob rau hauv cov tshuaj ntub dej ua, thiab ntug ntawm lub etched qauv yog ntse thiab meej. Kev daws teeb meem siab. Qhov tseeb tuaj yeem ncav cuag 0.1 ~ 0.01μm, thiab qhov roughness ntawm qhov zoo tshaj 0.05μm.
(4) Kev ua haujlwm yooj yim thiab rov ua haujlwm zoo. Vim tias lub nqaj ntom, lub zog, kev txav chaw lossis kev sib hloov ceev thiab lwm yam ua haujlwm tau yooj yim kom tau txais cov kev ua haujlwm zoo rau cov qauv sib txawv , uas tuaj yeem tsis tsuas yog tswj txoj kab nqes ntawm sab phab ntsa ntawm txoj kab, tab sis kuj tswj qhov tob ntawm qhov zawj kom hloov raws li ib qho kev ua haujlwm (qhov tob ntawm qhov zawj uas hloov raws li qee qhov kev ua haujlwm yog hu ua qhov tob qhov hnyav).
(5) Qhov tsis zoo ntawm ion beam etching yog tias muaj qhov tshwm sim ntawm qhov rov ua dua tshiab (rov ua dua tshiab) ntawm cov khoom siv sputtered. Nws yuav tsum tau hais nyob rau hauv kev xyaum.